Leadmicro.微导股票代码6881472024光伏技术百人会专题论坛TOPCon太阳电池技术装备发展情况展望廖宝臣(光伏CTO/教授)2024.09.26公众号·中国光伏行业协会CPIA江苏微导纳米科技股份有限公司JiangsuLeadmlaroNano-TechnologyCo.Ltd.SiNxAl₂Op+>Front-sideRear-side>Half-cutedgeSiOxntpoly-SiSiNxTOPCon电池技术发展近况与趋势TOPCon装备发展近况与趋势半片系列设备发展近况HJT新品介绍钙钛矿新品介绍公司简介总结公众号·中国光伏行业协会CPATrendofCellTechnologyLeadmicro撒导服素代码688147目录CONTENTSloodmicroConfidenhdl&ProprieloyLeadmicro.撒导股廉代码688147>光伏电池技术发展趋势与市占率分析■Multi■PERC■xBC■TOPCon■HJT■ThinFilm100%80%60%40%20222023F公众号·中国光伏业协会0PIAWhat'sNext?0%20202021Source:PVInfoLinkReportFeb_2024Leadmicro.撒导股票代码68814720%20%公众号·中国光伏行业协会CPIAfoI+-borondopedhomoondopodsmatter公众号·中国光伏行业协会CPIASource:ITRPV2024Leadmicro.撒导TrendofTOPConCellTechnology股原代码688147梁ITRPVPoly减薄>激光辅助烧结：firingtempreduced～20℃P其他，i道，27隆基，30捷秦，40品科，94Leadmicro.撒导Trend:TOPConRearSide股原代码688147PE-其他，151公众号·中国光伏行业协会CPIAITRPV2023Source:InfoLinkReport_Aug2024HomogenousLaserSELaserAssistedFiring公众号·中国光伏行业协会CPIASource:ITRPV2024通成，91Pvo4%853Gw下有建fotPoly-Si:LPCVDVSPECVD(~80)0>Tunneloxideandpoly-Si:in-situ天合7中润胡晶澳阳34圆特斯，30Leadmicro.撒导股代局688Trend:TOPConFrontSide>Trend:TOPConFrontSideTrend:TOPConRearSide20252027■PECVDDoS/EcMarketShare[%]LP40%PE56%World2033PE-TOPCon技术路线进展与展望26%26.5%>26.5%PE-TOPCon2.0PE-TOPCon3.0PE-TOPCon4.0(量产)(量产)(FutureOutlook)Leadmicro'sAnnealXH10000ALeadmicro'sPECVDZR5000X2Leadmicro'sAnnealXH10000ALeadmicro'sALD+PECVDKF20000+ZR5000X1Leadmicro'sPECVDZR中5000国X4光伏行业协会CPIALeadmicro微导般化号6A814PE-TOPCon1.0TextureBDiffusionSSEPEToxin-POlyAnnealPolyCleanF-AIO/SINR-SiNPrinting&FiringPE-TOPCon2.0TextureBDiffusionSEOxidationSSEPETox/n-RolyAnnealPolyCleanF=AIO/SiN、R-SiNQPrinting&FiringTOPCon装备发展近况与趋势SSEPEToxin-PolyAnnealPolyCleanF₅AIO./SINRSINPrinting&LAF1.解决规模化扩产中的爬坡问题2.降本上：2%PH3→8%PH3(降约3倍)3.效率提升上：SE,背面抛光+浆料优化Tox+Poly优化等24%PE-TOPCon0.0(中试)25%PE-TOPCon1.0(GW量产导入)1.完成1GW量产导入验证2.解决了该技术路线良率瓶颈3.效率>25%4.良率>97%2.PolyFinger3.TBC4.Polythinning5.EdgePassivation6.Etc.1.PE-TOPCon技术完成中试可行性攻关2.解决了该技术路线的设备与工艺瓶颈3.效率突破24%PE-TOPCon3.0TextureBDiffusion2023.12公众2024.06伏行业2024.12A公众号·中国光伏行业协会CPIALeadmicro微导股顺代丽688147Leadmicro.撒导股票代码688147PE-TOPConSolutions1.激光辅助烧结2.正面优化Leadmicro'sDiffusionXH10000022022.062021.051.Bi-PolyWhat'sMore?Uniquefromus量产稳工艺产能定性高支持效率良率镀导电膜的Know-How技术路线创始工艺团队支持，技术经验积累爬坡经验丰富Leadmicro.撒导股票代码688147All-in-one集成镀膜技术PECVDToxPoly技术优势>行业首创同管技术>原位沉积隧穿氧化层原位掺杂多晶硅原位沉积掩膜>原位掺杂其他材料掺杂浓度可调>沉积速率快&绕度小>效率高，Voc>730mVLeadmicro.撒导TOPCon产业化：ALD/PEALD/PECVD/Diffusion股票代码688147Leadmicro.撒导5thGen.PECVDToxPoly(ZR5000X2)股票代码688147Upto98.5%<0.03%石英损耗市占率公众号·中国无伏行业协会高A1月→3月→6月一>1年?(从25小时降至5小时)降低87%降低83%石英XHserieslow-pressureBdiff.(XH10000)公众号·中国光伏行业协会CPIAWafer(n)PECVDSiOPECVDn-Poly182:6800pcs/h5%,5%,4%210:5400pcs/h单管维护时间降低500%产能损失人工耗时无需降TOPConAlOx均匀...